Technology
How megasonic cleaning works
SONIQ uses controlled high-frequency acoustic energy transmitted through a liquid medium to remove particle contamination — without chemicals, without abrasion.
- 01
Acoustic energy generation
A piezoelectric transducer generates high-frequency sound waves at 1, 2, and 3 MHz, transmitted uniformly through the process liquid.
- 02
Cavitation & streaming
Controlled acoustic streaming and micro-cavitation dislodge sub-micron particles from the wafer surface — gently and uniformly across the entire substrate.
- 03
Particle transport & removal
Dislodged particles are carried away by the flowing liquid, preventing re-deposition and ensuring consistently high particle removal efficiency.
