Introducing the SONIQ series · Made in Germany

SONIQRF Generator Series

A new generation of megasonic RF generators, developed by DTEC in Stockach and made in Germany. Frequency bands from 465 kHz to 3 MHz, quarter- and third-width cabinets, and one command set from the smallest unit to the largest. SONIQ replaces a shelf of different generators with a single platform — and the first model is shipping.

See the series SONIQ 100 Flex — available now

465 kHz – 3 MHz

Frequency bands across the series

50 – 1500 W

RF output power classes

¼ & ⅓ of 2U

Quarter- and third-width cabinets

Made DE

Developed in Stockach, made in Germany

The platform

Five generators, one way of working

Megasonic processes do not all want the same frequency or the same power. Until now that meant different generators with different interfaces, different spares and different integration work every time. SONIQ ends that: the models differ in what they deliver, not in how you talk to them.

One command set

Integrate once

The same ASCII command set runs on every SONIQ model over RS-232 and Ethernet. Software written for the 100 Flex works with the 200 and the 1500 — a tool qualified on one generator stays qualified when the process moves to another.

Switchable bands

Two frequencies, one part number

The SONIQ 100 Flex covers 465 kHz and 925 kHz in a single unit. One generator type serves transducers in either band, so the fab holds one spare instead of two. Across the series, SONIQ spans 465 kHz to 3 MHz.

Compact cabinets

Reclaim the rack

The SONIQ 100 Flex and Pico Power each take a quarter of a 2U 19″ rack; the SONIQ 200 models take a third. At 3 kg a single unit mounts inside the tool frame with no rack at all.

The lineup

The SONIQ series at a glance

The SONIQ 100 Flex is released and available to order. The remaining models are in release preparation and follow over the coming weeks.

.	SONIQ 100 Flex465 / 925 kHzAvailable now	SONIQ 200925 kHzComing soon	SONIQ 2002 / 3 MHzComing soon	SONIQ 1500925 kHzComing soon	SONIQ Pico Power465 / 925 kHzComing soon
RF power	100 W	200 W	200 W	1500 W	50 W
Frequency	465 / 925 kHz switchable	925 kHz	2 or 3 MHz separate versions	925 kHz	465 or 925 kHz separate versions
Pulsing	✓	✓	✓	✓	—
Dual zone	—	✓	✓	—	—
RTD temperature monitoring	✓ 2 RTD	✓	✓	✓ 4 RTD	—
Communication
Ethernet (TCP/IP)	✓	✓	✓	✓	—
RS-232	✓	✓	✓	✓	—
Analog user I/O	✓	✓	✓	✓	✓
Mechanical
Rack width	¼ of 2U 19″ 35.0 × 10.7 × 8.4 cm	⅓ of 2U 19″ 35.0 × 14.2 × 8.4 cm	⅓ of 2U 19″ 35.0 × 14.2 × 8.4 cm	On release	¼ of 2U 19″
Country of origin	Germany	Germany	Germany	Germany	Germany

Scroll the table sideways to compare all five models

Available now

SONIQ 100 Flex · Model 465/925-100

The first SONIQ is here

100 W of forward-regulated megasonic power, switchable between 465 kHz and 925 kHz, in a cabinet the size of a shoebox. It drives single-wafer megasonic transducers, edge-bevel devices and tabletop systems within its power class — and it is available to order today.

Two frequency bands in one generator — 465 kHz and 925 kHz
Forward-power regulation, 0.1 W resolution, ±3 % or 2 W accuracy into 50 Ω
Pulsing from 1 ms to 5000 ms, 1–99 % duty, 100 µs minimum pulse
Two RTD channels with independent warning and alarm limits
Two interlock inputs; RF-OFF always accepted, even under remote control

Request a quote Request the datasheet

SONIQ 100 Flex RF generator, angled view of the quarter-width cabinet — SONIQ 100 Flex — quarter-width 2U cabinet, 3 kg

Advantages

Controlled, measured, and out of the way

The SONIQ 100 Flex pairs efficient amplifier circuitry with switched-mode supplies, and puts a purpose-written firmware controller between them and your process.

Reflected power watched continuously with separate warning and alarm limits, and a configurable minimum power below which the alarm is suppressed
Transducer temperature on two RTD channels, each with its own warning and alarm threshold from 0 to 90 °C
Two independent interlock inputs for flow, lid or tool safety loops
Frequency set in 1 Hz steps by direct digital synthesis, within a window you define
Timed or continuous operation — run a wave period from 1 s to 9 hours, or run continuously
No routine maintenance. Passive front, air cooled, spare fuse in the rear inlet

SONIQ 100 Flex front panel with On/Off, RF on, Error and Interlock indicators, mains switch and filtered air inlet — Front panel — four status LEDs, mains switch, air inlet

Where it runs

Single wafer, edge bevel, tabletop

The 100 W class covers the majority of single-substrate megasonic work. Where a process needs more power, two zones or a higher frequency, the same interface carries over to the rest of the series.

Single wafer

Megasonic transducers

FEOL and BEOL cleans, post-CMP, pre-bond and post-debond, mask cleaning, resist develop and strip, TSV and via residue removal, on substrates from 75 mm to 450 mm.

Edge bevel

Bevel cleaning devices

Contactless edge bevel processing at low flow and low rotation, where fine power resolution matters more than absolute power.

Tabletop & research

Benchtop systems

Tabletop megasonic systems, sonochemistry benches and research installations that need traceable, logged acoustic dosing.

Have any questions?

Whether you need a datasheet, a quote, an evaluation unit, or just want to know which model fits your process — get in touch and we will come back to you.

sales@dtec-semi.com Contact form

DTEC Semiconductor GmbH · Tuttlinger Str. 1 · 78333 Stockach, Germany